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How to Avoid Artifacts in Nanobeam Diffraction Strain Measurements

Published online by Cambridge University Press:  04 August 2017

B. Fu
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
M. Gribelyuk
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
Frieder H. Baumann
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA 12020
Yun-yu Wang
Affiliation:
GLOBALFOUNDRIES, 2070 Route 52, Hopewell Junction, NY 12533

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

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[5] The image processing using Python scripts includes: using the direct center spot in the diffraction patterns as a template and applying an edge filter to find real center of all the diffraction disks.Google Scholar
[6] Vincent, R, et al, Ultramicroscopy 53 1994). p. 271.CrossRefGoogle Scholar