An accuracy of better than 1% is needed to measure the changes in charge density due to bonding. Here we report an accuracy up to 0.025% (random error) obtained in rutile crystal structure factors measurement by QCBED. This error is the standard deviation in the mean value obtained from ten data sets. Systematic errors may be present. Figure 1 gives an example of the (200) refinement results. Table 1 lists several low order structure factor refinement results. The accuracy of the measured electron structure factors was 0.1-0.2% but after conversion to x-ray structure factors, the accuracy for low orders improved due to the Mott formula [1] For (110) and (101) reflections, the accuracy in x-ray structure factors became 0.025% and 0.048% respectively. This accuracy is equivalent to that of the X-ray single crystal Pendellosung method on silicon crystals [2].

The experiments were done on a Leo 912 Omega TEM.