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High Vertical Resolution Full-Field Reflection-Type Three-Dimensional Angle-Deviation Microscope with Nonlinear Error Compensation

Published online by Cambridge University Press:  20 May 2015

Ming-Hung Chiu ,
Chen-Tai Tan ,
Shih-Feng Huang  and
Jhao-An Chen
Ming-Hung Chiu*
Affiliation:
Department of Electro-Optical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan
Chen-Tai Tan
Affiliation:
Department of Electro-Optical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan
Shih-Feng Huang
Affiliation:
Department of Electro-Optical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan
Jhao-An Chen
Affiliation:
Department of Electro-Optical Engineering, National Formosa University, Huwei, Yunlin 632, Taiwan
*
*Corresponding author.mhchiu@nfu.edu.tw
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Abstract

This study examines the use of reflectivity-height transformation in full-field angle-deviation microscopes (ADM). In such microscopes, two light intensity distribution images of a prism’s total internal reflection and critical angle are obtained separately with two charge-coupled devices (CCDs), and are converted into a reflectivity profile point-to-point and then into angle of deviation matrix after the beam is reflected by the test sample; finally, the surface height of the sample is found through the triangular geometrical relationship. This method obtains the image through the effective imaging area of CCD. Once the two-dimensional (2D) image is obtained, the third dimension, height, is added to create a full-field 3D surface profile. Its conversion process is nonlinear; therefore, compensation must be made to reduce measurement errors. The optical magnification of high vertical resolution full-field 3D reflection-type ADM could reach >250 times, thus providing submicron measurements with nanometer vertical resolution and allowing for the simultaneous measurement of 2D and 3D images. Small defects on both transparent and nontransparent surfaces can be rapidly detected.

Keywords

three dimensional (3D)charge-coupled device (CCD)critical angleoptical microscopeangle-deviation microscope
Type
Techniques and Equipment Development
Information
Microscopy and Microanalysis , Volume 21 , Issue 3 , June 2015 , pp. 778 - 787
Copyright
© Microscopy Society of America 2015 

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References

Betzig, E., Lewis, A., Harootunian, A., Isaacson, M. & Kratschmer, E. (1986). Near field scanning optical microscopy (NSOM): Development and biophysical applications. Biophys J 49(1), 269–279.Google Scholar
Carlsson, K., Danielsson, P.E., Lenze, R., Liljeborg, A., Majlöf, L. & Åslund, N. (1985). Three-dimensional microscopy using a confocal laser scanning microscope. Opt Lett 10, 53–55.Google Scholar
Caulfield, H.J. (1978). White light interferometric microscopes. Opt Commun 26(3), 322–324.Google Scholar
Chen, C.C., Chen, H.H., Chiu, M.H., Lee, K.H. & Su, D.C. (1999). Heterodyne interferometry method for measuring physical parameters of medium. US Patent No 5946096.Google Scholar
Chiu, M.H., Lai, C.W., Tan, C.T. & Lai, C.F. (2008). Transmission-type angle deviation microscopy. Appl Opt 47, 5442–5445.Google Scholar
Chiu, M.H., Shih, B.Y. & Lai, C.W. (2007). Laser-scanning angle deviation microscopy. Appl Phys Lett 90, 021111.Google Scholar
Chiu, M.H., Tan, C.T., Lee, T.S. & Lee, J.C. (2013). Non-scanning three-dimensional optical microscope based on the reflectivity-height transformation for biological measurements. Microsc Microanal 19, 425–432.Google Scholar
Delaunay, G. (1953). Microscope interférentiel A. Mirau pour la mesure du fini des surfaces. Rev Opt Theor Instrum 32, 610–614.Google Scholar
Garini, Y.B., Vermolen, B.J. & Young, I.T. (2005). From micro to nano: Recent advances in high-resolution microscopy. Curr Opin Biotechnol 16, 3–12.Google Scholar
Groot, P.D. (2011). Chapter 8: Phase Shifting Interferometry. In Optical Measurement of Surface Topography, Leach, R. (Ed.), pp. 175–178. Scientific Publishing Services Pvt. Ltd., Chennai, India.Google Scholar
Kino, G.S. & Chim, S.S.C. (1990). Mirau correlation microscope. Appl Opt 29, 3775–3783.Google Scholar
Lee, B.S. & Strand, T.C. (1990). Profilometry with a coherence scanning microscope. Appl Opt 29(26), 3784–3788.Google Scholar
Pawley, J.B. (2006). Handbook of Biological Confocal Microscopy, 3rd ed., chapter 16, New York, NY: Plenum Press. pp. 338–348.Google Scholar
Tan, C.T., Chan, Y.S., Chen, J.A., Liao, T.C. & Chiu, M.H. (2011 a). Non-scanning, non-interferometric, three-dimensional optical profilometer with nanometer resolution. Chin Opt Lett 9(10), 101202-1–3.Google Scholar
Tan, C.T., Chan, Y.S., Lin, Z.C. & Chiu, M.H. (2011 b). Angle-deviation optical profilometer. Chin Opt Lett 9(1), 011201-1–3.Google Scholar