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High Resolution Imaging in the Field Emission Scanning Electron Microscope at Low Accelerating Voltage and with Energy-Filtration of the Electron Signals

Published online by Cambridge University Press:  27 August 2014

Raynald Gauvin
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Nicolas Brodusch
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Hendrix Demers
Affiliation:
Department of Mining and Materials Engineering, McGill University, Montreal, Quebec, Canada
Patrick Woo
Affiliation:
Hitachi High-Technologies Canada Inc., Toronto, Canada

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Goldstein, J.I., et al, “Scanning Electron Microscopy and X-Ray Microanalysis”, (Springer, 3rd edition (2003).Google Scholar
[2] Wells, O.C. “The construction of a scanning electron microscope and its application to the study offibres”, Ph.D. Dissertation, (Cambridge University, England, 1957).Google Scholar
[3] Wells, O. C. Scanning, 2 (1979), pp. 199-216.Google Scholar
[4] Joy, D.C. Journal of Microscopy, 208 (2002), pp. 24-34.Google Scholar
[5] Kim, J. et al, Journal of Vacuum Science Technology B, 25 (2007), pp. 1771-1775.Google Scholar