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High Resolution and Energy-Filtered TEM Imaging of Pd Diffusion in Crystalline Si

Published online by Cambridge University Press:  05 August 2007

J Risner-Jamtgaard ,
X Xu ,
Q-F Xiao ,
D Yaney  and
L Vinh
J Risner-Jamtgaard
Affiliation:
Hitachi Global Storage Technologies,Inc
X Xu
Affiliation:
Hitachi Global Storage Technologies,Inc
Q-F Xiao
Affiliation:
Hitachi Global Storage Technologies,Inc
D Yaney
Affiliation:
Hitachi Global Storage Technologies,Inc
L Vinh
Affiliation:
Hitachi Global Storage Technologies,Inc
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 844 - 845
Copyright
© 2007 Microscopy Society of America

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