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Growth and Characterization of Ge/Si (112) Islands

Published online by Cambridge University Press:  02 July 2020

M. Floyd ,
David J. Smith ,
Y. Zhang ,
J. Drucker ,
S. Tari ,
G. Brill  and
S. Sivananthan
M. Floyd
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ85287-1704
David J. Smith
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ85287-1704
Y. Zhang
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ85287-1504
J. Drucker
Affiliation:
Department of Physics and Astronomy, Arizona State University, Tempe, AZ85287-1504
S. Tari
Affiliation:
Microphysics Laboratory, University of Illinois at Chicago, Chicago, IL60607
G. Brill
Affiliation:
Microphysics Laboratory, University of Illinois at Chicago, Chicago, IL60607
S. Sivananthan
Affiliation:
Microphysics Laboratory, University of Illinois at Chicago, Chicago, IL60607
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Abstract

The spontaneous formation of so-called self-assembled quantum dots (SAQDs) during heteroepitaxial growth has attracted much recent interest because of potential device applications. Much attention has been directed towards the Ge/Si(001) system, in particular to characterize the island shape and size distributions as a function of growth conditions, i.e., Ge coverage and substrate temperature. Due to the lattice mismatch, a layer-to-island transition occurs at coverages greater than about 3 monolayers, and thereafter small, coherent hut clusters and larger coherent and incoherent dome clusters are observed. Interdiffusion of Si into the Ge islands as a strain-relief mechanism also occurs. Strategies for achieving better control of island size, shape, composition and separation continue to be sought. in this paper, we report a preliminary investigation of island growth in the alternative Ge/Si(l12) system.

The Ge/Si(112) samples were grown by molecular beam epitaxy using a Riber 2300 system equipped with a Ge Knudsen effusion cell.

Type
Semiconductors
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 564 - 565
Copyright
Copyright © Microscopy Society of America 2001

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References

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5. This work was partially supported by NSF Grant DMR-9804310.Google Scholar