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Formation of markers by a helium ion microscope for TEM tomography

  • M. Hayashida (a1), T. Iijima (a1), M. Tsukahara (a1), T. Fujimoto (a1) and S. Ogawa (a1)...

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

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Formation of markers by a helium ion microscope for TEM tomography

  • M. Hayashida (a1), T. Iijima (a1), M. Tsukahara (a1), T. Fujimoto (a1) and S. Ogawa (a1)...

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