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Focused Ion Beam Circuit Edit–A Look into the Past, Present, and Future

Published online by Cambridge University Press:  08 April 2017

R Livengood ,
S Tan ,
P Hack ,
M Kane  and
Y Greenzweig
R Livengood
Affiliation:
Intel
S Tan
Affiliation:
Intel
P Hack
Affiliation:
Intel
M Kane
Affiliation:
Intel
Y Greenzweig
Affiliation:
Intel

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 672 - 673
Copyright
Copyright © Microscopy Society of America 2011