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A Fast and Accurate Workflow for Analytic 3D FIB-SEM Tomography

Published online by Cambridge University Press:  05 August 2019

T. Volkenandt ,
F. Pérez-Willard ,
F. Bauer ,
N. Stephen ,
J. Goulden ,
P. Trimby  and
K. Larsen
T. Volkenandt*
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany.
F. Pérez-Willard
Affiliation:
Carl Zeiss Microscopy GmbH, Oberkochen, Germany.
F. Bauer
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, UK.
N. Stephen
Affiliation:
University of Plymouth, Plymouth, UK.
J. Goulden
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, UK.
P. Trimby
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, UK.
K. Larsen
Affiliation:
Oxford Instruments NanoAnalysis, High Wycombe, UK.
*
*Corresponding author: tobias.volkenandt@zeiss.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 918 - 919
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Zaefferer, S. and Wright, S. in “EBSD in Material Science”, ed. Schwartz, A., Kumar, M., Adams, B, Field, D. (Springer) p.109.Google Scholar
[2]Parts of the presented results were achieved in collaboration with the University of Plymouth. This collaborative work has been supported by the European Regional Development Fund.Google Scholar