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Exploiting the in-situ Electrical X-ray Microscopy for Semiconductor Nano Devices Analysis by X-ray Nanoprobe Beamline at Taiwan Photon Source

Published online by Cambridge University Press:  10 August 2018

Shao-Chin Tseng ,
Bi-Hsuan Lin ,
Xiao-Yun Li ,
Yu-Sheng Lai ,
Po-Hsien Tseng ,
Chien-Yu Lee ,
Bo-Yi Chen ,
Gung-Chian Yin ,
Ming-Ying Hsu  and
Shih-Hung Chang
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Shao-Chin Tseng*
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Bi-Hsuan Lin
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Xiao-Yun Li
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Yu-Sheng Lai
Affiliation:
National Nano Device Laboratories, Hsinchu30078, Taiwan
Po-Hsien Tseng
Affiliation:
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu30010, Taiwan
Chien-Yu Lee
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Bo-Yi Chen
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Gung-Chian Yin
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Ming-Ying Hsu
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Shih-Hung Chang
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
Mau-Tsu Tang
Affiliation:
National Synchrotron Radiation Research Center, Hsinchu30076, Taiwan
*
*Corresponding author: email: tseng.sc@nsrrc.org.tw

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 430 - 431
Copyright
© Microscopy Society of America 2018 

References

[1] Lin, Bi-Hsuan, Chen, Huang-Yeh, Tseng, Shao-Chin, Wu, Jian-Xing, Chen, Bo-Yi, Lee, Chien-Yu, Yin, Gung-Chian, Chang, Shih-Hung, Tang, Mau-Tsu Hsieh, Wen-Feng Applied Physics Letters 109, 192104 2016.Google Scholar
[2] Lin, Bi-Hsuan, Wu, Yung-Chi, Chen, Huang-Yeh, Tseng, Shao-Chin, Wu, Jian-Xing, Li, Xiao-Yun, Chen, Bo-Yi, Lee, Chien-Yu, Yin, Gung-Chian Chang, Shih-Hung Optics Express 26, 2731–2739, 2018.Google Scholar
[3] Holt, Martin V., Hruszkewycz, Stephan O., Murray, Conal E., Holt, Judson R., Paskiewicz, Deborah M. Fuoss, Paul H. Physical Review Letters 112, 165502 2014.Google Scholar
[4] Ministry of Science and Technology of Taiwan (105-2112-M-213-011-MY2) and the National Synchrotron Radiation Research Center provided support for this research..Google Scholar