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Exciting Possibilities of Soft X-ray Emission Spectroscopy as Chemical State Analysis in EPMA and FESEM

Published online by Cambridge University Press:  27 August 2014

H. Takahashi
Affiliation:
EO Peripheral Component BU, JEOL Ltd, 1-2 Musashino, Akishima Tokyo 196-8558, Japan
N. Handa
Affiliation:
EO Peripheral Component BU, JEOL Ltd, 1-2 Musashino, Akishima Tokyo 196-8558, Japan
T. Murano
Affiliation:
EO Peripheral Component BU, JEOL Ltd, 1-2 Musashino, Akishima Tokyo 196-8558, Japan
M. Terauchi
Affiliation:
Inst. for Multidisciplinary Research for Advanced Materials, Tohoku Univ. Sendai 980-8577 Japan
M. Koike
Affiliation:
Japan Atomic Energy Agency 8-1, Umemidai, Kizu 619-0215, Japan
T. Kawachi
Affiliation:
Japan Atomic Energy Agency 8-1, Umemidai, Kizu 619-0215, Japan
T. Imazono
Affiliation:
Japan Atomic Energy Agency 8-1, Umemidai, Kizu 619-0215, Japan
N. Hasegawa
Affiliation:
Japan Atomic Energy Agency 8-1, Umemidai, Kizu 619-0215, Japan
M. Koeda
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
T. Nagano
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
H. Sasai
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
Y. Oue
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
Z. Yonezawa
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
S. Kuramoto
Affiliation:
Optical Components BU Device Dept., SHIMADZU Corp. 1 Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto 604-8511 Japan
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Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Terauchi, M., et al., J. Electron Microscopy, 61, 1 (2012).CrossRef
[2] Imazono, T., et al., Appl. Opt. 51, 2351 (2012).CrossRef
[3] Takahashi, H., et al., Microscopy and Microanalysis, 19 (supple. 2), 1258 (2013).CrossRef
[4] Takahashi, H., et al., Microscopy and Microanalysis, 19 (supple. 2), 1258 (2013).CrossRef

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