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Examining the Microstructure and Impurity Distribution of Narrow Lines and Vias

Published online by Cambridge University Press:  05 August 2007

KA Dunn ,
J Rullan  and
R van den Boom
KA Dunn
Affiliation:
State University of New York,Albany
J Rullan
Affiliation:
State University of New York,Albany
R van den Boom
Affiliation:
State University of New York,Albany
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 818 - 819
Copyright
© 2007 Microscopy Society of America

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