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Evidence for a Critical Amorphization Thickness Limit of Ga+ Ion Bombardment in Si

  • L Giannuzzi (a1), B Van Leer (a1) and J Ringnalda (a1)

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Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

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Evidence for a Critical Amorphization Thickness Limit of Ga+ Ion Bombardment in Si

  • L Giannuzzi (a1), B Van Leer (a1) and J Ringnalda (a1)

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