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Evidence for a Critical Amorphization Thickness Limit of Ga+ Ion Bombardment in Si

Published online by Cambridge University Press:  05 August 2007

L Giannuzzi ,
B Van Leer  and
J Ringnalda
L Giannuzzi
Affiliation:
FEI Company
B Van Leer
Affiliation:
FEI Company
J Ringnalda
Affiliation:
FEI Company
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 1516 - 1517
Copyright
© 2007 Microscopy Society of America

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