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Enabling Future Nanotomography and Nanofabrication with Crossbeam Technology

Published online by Cambridge University Press:  27 August 2014

Ingo Schulmeyer  and
Martin Kienle
Ingo Schulmeyer
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany
Martin Kienle
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Straße 22, 73447 Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1110 - 1111
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Holzer, L. & Cantoni, M. Review of FIB-tomography, Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (2011), p. 410ff.Google Scholar
[2] Lechner, L., Biskupek, J. and Kaiser, U. Improved Focused Ion Beam Target Preparation of (S)TEM Specimen - A Method for Obtaining Ultrathin Lamellae, Microscopy and Microanalysis 18 (2012), p. 379-384.Google Scholar