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Electron Probe Microanalysis of Thin Films and Multilayers Using the Computer Program XFILM

  • Xavier Llovet (a1) and Claude Merlet (a2)


XFILM is a computer program for determining the thickness and composition of thin films on substrates and multilayers by electron probe microanalysis. In this study, we describe the X-ray emission model implemented in the latest version of XFILM and assess its reliability by comparing measured and calculated k-ratios from thin-film samples available in the literature. We present and discuss examples of applications of XFILM that illustrate the capabilities of the program.


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