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Electron Beam Induced Deposition and Etching: Fundamentals, Challenges and Nanotechnology–based Applications

Published online by Cambridge University Press:  26 July 2009

J Fowlkes ,
DA Smith ,
MG Lassiter  and
PD Rack
J Fowlkes
Affiliation:
Oak Ridge National Laboratory
DA Smith
Affiliation:
The University of Tennessee,Knoxville
MG Lassiter
Affiliation:
The University of Tennessee,Knoxville
PD Rack
Affiliation:
The University of Tennessee,Knoxville

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 318 - 319
Copyright
Copyright © Microscopy Society of America 2009