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Electron Backscatter Diffraction In The Sem: Is Electron Diffraction In The Tem Obsolete?

Published online by Cambridge University Press:  02 July 2020

J. R. Michael ,
M. E. Schlienger  and
R. P. Goehner
J. R. Michael
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185-1405
M. E. Schlienger
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185-1405
R. P. Goehner
Affiliation:
Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185-1405
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Extract

The technique of electron backscatter diffraction (EBSD) in the scanning electron microscope is currently finding a large number of important applications in materials science. The patterns formed through EBSD were first studied over 40 years ago. It has only been in the last 10 years that the technique has really begun to have an impact on the study of materials. The introduction of automatic pattern indexing software has enabled the technique to be used for mapping the orientation of a polycrystalline sample. The more exciting and universally interesting application of the technique has been the identification of micron and sub-micron sized crystalline phases based on their chemistry and crystallography determined by EBSD.

EBSD is obtained by illuminating a highly tilted sample (>45° from horizontal) with a stationary electron beam. Electrons backscattered from the sample may satisfy the condition for channeling and will produce images that contain bands of increased and decreased intensity that are equivalent to electron channeling patterns.

Type
Microscopy and Microanalysis: “Showstoppers” in Critical Applications Areas
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 879 - 880
Copyright
Copyright © Microscopy Society of America 1997

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References

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This work was supported by the United States Department of Energy under Contract DE-AC04- 94AL85000. Sandia is a multiprogram laboratory operated by Sandia Corporation, a Lockheed Martin Company, for the United States Department of Energy.Google Scholar