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Development of 30-kV Cc/Cs Correction Tandem System

Published online by Cambridge University Press:  08 April 2017

H Sawada
Affiliation:
JEOL Ltd, Japan
F Hosokawa
Affiliation:
JEOL Ltd, Japan
T Sasaki
Affiliation:
JEOL Ltd, Japan
S Yuasa
Affiliation:
JEOL Ltd, Japan
M Kawazoe
Affiliation:
JEOL Ltd, Japan
M Terao
Affiliation:
JEOL Ltd, Japan
T Kaneyama
Affiliation:
JEOL Ltd, Japan
Y Kondo
Affiliation:
JEOL Ltd, Japan
K Kimoto
Affiliation:
National Institute for Materials Science, Japan
K Suenaga
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011

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