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Developing Higher Quality Conductors and Insulators to Enable Fieldable FIB edits to Complex Microelectronics

Published online by Cambridge University Press:  30 July 2021

Peter Lewis ,
Isaac Moran ,
Elizabeth Brundage ,
Robert Day  and
Katherine Graham
Peter Lewis
Affiliation:
Draper, United States
Isaac Moran
Affiliation:
Draper, United States
Elizabeth Brundage
Affiliation:
Draper, United States
Robert Day
Affiliation:
Draper, United States
Katherine Graham
Affiliation:
Draper, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 212
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America