Hostname: page-component-5c6d5d7d68-sv6ng Total loading time: 0 Render date: 2024-08-20T08:51:16.070Z Has data issue: false hasContentIssue false
  • English
  • Français

Determining the Causes of Scanning Distortions in SEM and FIB

Published online by Cambridge University Press:  23 September 2015

Mariusz Pluska ,
Andrzej Czerwinski ,
Marek Wzorek ,
Marcin Juchniewicz  and
Jerzy Katcki
Mariusz Pluska
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Andrzej Czerwinski
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Marek Wzorek
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Marcin Juchniewicz
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland
Jerzy Katcki
Affiliation:
Institute of Electron Technology, Al. Lotnikow 32/46, Warsaw 02-668, Poland

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1703 - 1704
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Kim, D.H., Kim, S.J. & Oh, S.K., Nuclear Instruments and Methods in Physics Research A 620(2 (2010). p. 112.Google Scholar
[2] Pluska, M., et at, Journal of Microscopy 224(1 (2006). p. 89.CrossRefGoogle Scholar
[3] Pluska, M., et at, Nuclear Instruments and Methods in Physics Research B (2014) doi:10.1016/j.nimb.2014.11.020.Google Scholar
[4] Vladar, A.E. Scanning electron microscopy in real world environment 2003). www.nanobuitdings.com.Google Scholar
[5] Jung, K.O., Kim, S.J. & Kim, D.H., Nuclear Instruments and Methods in Physics Research A 676 (2012). p. 5.Google Scholar
[6] Cheung, C.S. Shielding Effectiveness of Superalloy, Aluminum, and Mumetal Shielding Tapes 2009). Master's Theses and Project Reports, p. 126.Google Scholar
[7] The research was partially supported by the grant LIDER/26/169/L-3/11/NCBR/2012 of National Centre for Research and Development, Poland.Google Scholar