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Determination of dielectric permittivity from EELSpectra in semiconductor structures

  • P Potapov (a1), H-J R Engelmann (a1), E Zschech (a1) and M Stöger-Pollach (a2)

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Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

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Determination of dielectric permittivity from EELSpectra in semiconductor structures

  • P Potapov (a1), H-J R Engelmann (a1), E Zschech (a1) and M Stöger-Pollach (a2)

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