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Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope
Published online by Cambridge University Press: 26 July 2009
Extract
Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009
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- Copyright © Microscopy Society of America 2009