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Demonstration of Pick and Place Assembly for Scaled MEMS Devices

Published online by Cambridge University Press:  31 July 2006

J Jeon ,
I Gory ,
G Skidmore ,
MJ Kim  and
BE Gnade
J Jeon
Affiliation:
University of Texas,Dallas
I Gory
Affiliation:
Zyvex Corporation
G Skidmore
Affiliation:
Zyvex Corporation
MJ Kim
Affiliation:
University of Texas,Dallas
BE Gnade
Affiliation:
University of Texas,Dallas

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 560 - 561
Copyright
© 2006 Microscopy Society of America