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A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection

Published online by Cambridge University Press:  04 August 2017

Maximilian Schmid
Affiliation:
PNDetector GmbH, München, Germany
Andreas Liebel
Affiliation:
PNDetector GmbH, München, Germany
Robert Lackner
Affiliation:
PNDetector GmbH, München, Germany
Daniel Steigenhöfer
Affiliation:
PNDetector GmbH, München, Germany
Adrian Niculae
Affiliation:
PNDetector GmbH, München, Germany
Heike Soltau
Affiliation:
PNDetector GmbH, München, Germany
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Abstract

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© Microscopy Society of America 2017 

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A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection
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A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection
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