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Control and in-situ imaging of heat & gas mediated processes in FIB/SEM system

Published online by Cambridge University Press:  01 August 2018

Libor Novak ,
Miroslav Kolibal ,
Min Wu ,
Petr Wandrol  and
Tomas Vystavel
Libor Novak
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Miroslav Kolibal
Affiliation:
Central European Institute of Technology - CEITEC, Purkynova 123, Brno, Czech Republic
Min Wu
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Petr Wandrol
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic
Tomas Vystavel
Affiliation:
Thermo Fisher Scientific, Vlastimila Pecha 12, 627 00Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 808 - 809
Copyright
© Microscopy Society of America 2018 

References

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[9] The authors acknowledge funding from Technology Agency of the Czech Republic, TE01020118.Google Scholar