Skip to main content Accessibility help
×
Home

Compositional Analysis with Atomic Column Spatial Resolution by 5th-Order Aberration-Corrected Scanning Transmission Electron Microscopy

  • David Hernández-Maldonado (a1), Miriam Herrera (a1), Pablo Alonso-González (a2), Yolanda González (a2), Luisa González (a2), Jaume Gazquez (a3), María Varela (a3), Stephen J. Pennycook (a3), María de la Paz Guerrero-Lebrero (a4), Joaquín Pizarro (a4), Pedro L. Galindo (a4) and Sergio I. Molina (a1)...

Abstract

We show in this article that it is possible to obtain elemental compositional maps and profiles with atomic-column resolution across an InxGa1−xAs multilayer structure from 5th-order aberration-corrected high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) images. The compositional profiles obtained from the analysis of HAADF-STEM images describe accurately the distribution of In in the studied multilayer in good agreement with Muraki's segregation model [Muraki, K., Fukatsu, S., Shiraki, Y. & Ito, R. (1992). Surface segregation of In atoms during molecular beam epitaxy and its influence on the energy levels in InGaAs/GaAs quantums wells. Appl Phys Lett61, 557–559].

Copyright

Corresponding author

Corresponding author. E-mail: david.hernandez@uca.es

References

Hide All
Browning, N.D., Chisholm, M.F. & Pennycook, S.J. (1993). Atomic-resolution chemical analysis using a scanning transmission electron microscope. Nature 366, 143146.
Browning, N.D. & Pennycook, S.J. (1996). Direct experimental determination of the atomic structure at internal interfaces. J Phys D 29, 17791798.
Heidelmann, M., Barthel, J. & Houben, L. (2009). StripeSTEM, a technique for the isochronus acquisition of high angle annular dark-field images and monolayer resolved electron energy loss spectra. Ultramicroscopy 109, 14471452.
Krivanek, O.L., Chisholm, M.F., Nicolosi, V., Pennycook, T.J., Corbin, G.J., Dellby, N., Murfitt, M.F., Own, C.S., Szilagyi, Z.S., Oxley, M.P., Pantelides, S.T. & Pennycook, S.J. (2010). Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy. Nature 464, 571574.
Krivanek, O.L., Corbin, G.J., Dellby, N., Elston, B.F., Keyse, R.J., Murfitt, M.F., Own, C.S., Szilagyi, Z.S. & Woodruff, J.W. (2008). An electron microscope for the aberration-corrected era. Ultramicroscopy 108, 179195.
LeBeau, J.M., Findlay, S.D., Allen, L.J. & Stemmer, S. (2008). Quantitative atomic resolution scanning transmission electron microscopy. Phys Rev Lett 100, 206101.
LeBeau, J.M., Findlay, S.D., Wang, X., Jacobson, A.J., Allen, L.J. & Stemmer, S. (2009). High-angle scattering of fast electron from crystals containing heavy elements: Simulations and experiments. Phys Rev B 79, 214110.
Molina, S.I., Sales, D.L., Galindo, P.L., Fuster, D., González, Y., Alén, B., González, L., Varela, M. & Pennycook, S.J. (2009). Column-by-column compositional mapping by Z-contrast imaging. Ultramicroscopy 109, 172176.
Muraki, K., Fukatsu, S., Shiraki, Y. & Ito, R. (1992). Surface segregation of In atoms during molecular beam epitaxy and its influence on the energy levels in InGaAs/GaAs quantums wells. Appl Phys Lett 61, 557559.
Nellist, P.D., Chisholm, M.F., Dellby, N., Krivanek, O.L., Murfitt, M.F., Szilagyi, S.Z., Lupini, A.R., Borisevich, A., Sides, W.H. Jr. & Pennycook, S.J. (2004). Direct sub-Angstrom imaging of a crystal lattice. Science 305, 1741.
Pennycook, S.J. & Boatner, L.A. (1988). Chemically sensitive structure-imaging with a scanning transmission electron microscope. Nature 336, 565567.
Van Aert, S., Verbeeck, J., Erni, R., Bals, S., Luysberg, M., Van Dyck, D. & Van Tendeloo, G. (2009). Quantitative atomic resolution mapping using high-angle annular dark field scanning transmission electron microscopy. Ultramicroscopy 109, 12361244.

Keywords

Compositional Analysis with Atomic Column Spatial Resolution by 5th-Order Aberration-Corrected Scanning Transmission Electron Microscopy

  • David Hernández-Maldonado (a1), Miriam Herrera (a1), Pablo Alonso-González (a2), Yolanda González (a2), Luisa González (a2), Jaume Gazquez (a3), María Varela (a3), Stephen J. Pennycook (a3), María de la Paz Guerrero-Lebrero (a4), Joaquín Pizarro (a4), Pedro L. Galindo (a4) and Sergio I. Molina (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed