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Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope

Published online by Cambridge University Press:  23 September 2015

Michael T. Postek
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
John Villarrubia
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
Andras E. Vladar
Affiliation:
1-3.National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD 20899
Atsushi Muto
Affiliation:
4.Hitachi High Technologies America, Clarksburg, MD 20871

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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[2] Certain commercial equipment is identified in this report to adequately describe the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment identified is necessarily the best available for the purpose.Google Scholar
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