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Comparison of Secondary, Backscattered and Low Loss Electron Imaging for Dimensional Measurements in the Scanning Electron Microscope - Part 2

Published online by Cambridge University Press:  25 July 2016

Michael T. Postek
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
John Villarrubia
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
András E. Vladár
Affiliation:
National Institute of Standards and Technology, Physical Measurement Laboratory, Gaithersburg, MD
Atsushi Muto
Affiliation:
Hitachi High Technologies America, Clarksburg, MD

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Contribution of the National Institute of Standards and Technology; not subject to copyright.Google Scholar
[2] Certain commercial equipment is identified in this report to adequately describe the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment identified is necessarily the best available for the purpose.Google Scholar
[3] Villarrubia, J. S., et al., Ultramicroscopy 154 (2015). p. 15.CrossRefGoogle Scholar
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