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Comparative Study of Scanning Ion Microscope and Scanning Electron Microscope Images Using Monte Carlo Simulations

Published online by Cambridge University Press:  01 August 2004

Tohru Ishitani  and
Kaoru Ohya
Tohru Ishitani
Affiliation:
Hitachi High Technologies, Ibaraki, Japan
Kaoru Ohya
Affiliation:
University of Tokushima, Tokushima, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 140 - 141
Copyright
© 2004 Microscopy Society of America

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