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Comparative Analysis of TEM and Atom Probe Tomography on GeSbTe Compositions in Phase Change Random Access Memory

  • K. Hwang (a1), J. Bae (a1), K. Park (a1), S. Jeon (a1), J. Ahn (a1), S. Kim (a1), H. Jeong (a1), S. Nam (a1), G. Jeong (a1), D. Jang (a2) and C. Park (a2)...


Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.



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