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A Compact Aberration Corrector for SEMs with Electrostatic-field formed by Annular and Circular Electrodes

Published online by Cambridge University Press:  05 August 2019

Tadahiro Kawasaki
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Ryuji Yoshida
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Takeharu Kato
Affiliation:
Nanostructures Research Laboratory, Japan Fine Ceramics Center, Nagoya, Japan
Tsunenori Nomaguchi
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Shunichi Motomura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Kenichi Nishinaka
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Toshihide Agemura
Affiliation:
Hitachi High-Technologies, Hitachinaka, Japan
Takashi Ikuta
Affiliation:
Faculty of Engineering, Osaka Electro-Communication University, Neyagawa, Japan
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Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Kawasaki, T., et al. , Suf. Int. Anal, 48 (2015) 1160CrossRefGoogle Scholar
[2]Kawasaki, T., et al. , PCT/JP2016/053691Google Scholar
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A Compact Aberration Corrector for SEMs with Electrostatic-field formed by Annular and Circular Electrodes
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