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Combining a Nanoprobing Setup with PFIB Sample Deprocessing

Published online by Cambridge University Press:  05 August 2019

Andrew J. Smith ,
Andreas Rummel ,
Matthias Kemmler  and
Stephan Kleindiek
Andrew J. Smith*
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany.
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany.
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany.
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany.
*
*Corresponding author: andrew.smith@kleindiek.com

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 874 - 875
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Zudhistira, D, et al. , International Symposium of Testing & Failure Analysis (2017).Google Scholar
[2]Simon-Najasek, M, et al. , International Symposium for Testing and Failure Analysis, (2012).Google Scholar
[3]Zudhistira, D, et al. , International Symposium for Testing and Failure Analysis, (2018).Google Scholar