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Chemical Mapping at the Atomic Level using Energy Dispersive X-ray Spectroscopy

Published online by Cambridge University Press:  08 April 2017

D Klenov
Affiliation:
FEI Company
B Freitag
Affiliation:
FEI Company
H von Harrach
Affiliation:
FEI Company
A D'Alfonso
Affiliation:
University of Melbourne
L Allen
Affiliation:
University of Melbourne

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2011