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Characterization of Epitaxial Layer Defects in Silicon Wafers Using Focused Ion Beam and Transmission Electron Microscopy

Published online by Cambridge University Press:  01 August 2005

J–H Cho ,
D–H Cho ,
C–W Lee ,
W–Y Kim  and
S–H Lim
J–H Cho
Affiliation:
Kangwon National University, South Korea
D–H Cho
Affiliation:
Kangwon National University, South Korea
C–W Lee
Affiliation:
Korea Institute of Industrial Technology, South Korea
W–Y Kim
Affiliation:
Korea Institute of Industrial Technology, South Korea
S–H Lim
Affiliation:
Kangwon National University, South Korea

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2086 - 2087
Copyright
© 2005 Microscopy Society of America