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Beam Broadening Measured in Transmission Mode at Low Electron Energies in a Scanning Electron Microscope

Published online by Cambridge University Press:  05 August 2019

Milena Hugenschmidt ,
Erich Müller  and
Dagmar Gerthsen
Milena Hugenschmidt
Affiliation:
Laboratory for Electron Microscopy, Karlsruhe Institute of Technology, Karlsruhe, Germany.
Erich Müller*
Affiliation:
Laboratory for Electron Microscopy, Karlsruhe Institute of Technology, Karlsruhe, Germany.
Dagmar Gerthsen
Affiliation:
Laboratory for Electron Microscopy, Karlsruhe Institute of Technology, Karlsruhe, Germany.
*
*Corresponding author: erich.mueller@kit.edu

Abstract

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Type
Low Voltage, Low Energy Electron Microscopy Imaging and Analysis
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 478 - 479
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Drees, H et al. , Ultramicroscopy, 185 (2017), p. 65.Google Scholar
[2]Gauvin, R, Rudinsky, S, Ultramicroscopy, 167 (2016), p. 21.Google Scholar
[3]The authors acknowledge funding by the Deutsche Forschungsgemeinschaft (DFG) under contract number Ge 841/20-2.Google Scholar