Assessment of SEM Image Quality using 1D Power Spectral Density Estimation

SJ Moody; MR Phillips; M Toth

doi:10.1017/S1431927609098821

Assessment of SEM Image Quality using 1D Power Spectral Density Estimation

Published online by Cambridge University Press: 26 July 2009

SJ Moody ,

MR Phillips and

M Toth

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SJ Moody: Affiliation:
University of Technology,Sydney Australia
MR Phillips: Affiliation:
University of Technology,Sydney Australia
M Toth: Affiliation:
FEI Company

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type: Abstract
Information: Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 48 - 49

DOI: https://doi.org/10.1017/S1431927609098821 [Opens in a new window]

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Assessment of SEM Image Quality using 1D Power Spectral Density Estimation

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