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APT Tip Shape Modifications During Analysis, Its Implications, and the Potential to Measure Tip Shapes in Real Time via Soft-X-Ray Ptychography

Published online by Cambridge University Press:  05 August 2019

Paul van der Heide ,
Igor Mathotkin ,
Wilfried Vandervorst  and
Claudia Fleischmann
Paul van der Heide*
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium
Igor Mathotkin
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium Instituut voor Kern- en Stralingsfysica (IKS), KU Leuven, Celestijnenlaan 200D, Leuven, Belgium.
Wilfried Vandervorst
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium Instituut voor Kern- en Stralingsfysica (IKS), KU Leuven, Celestijnenlaan 200D, Leuven, Belgium.
Claudia Fleischmann
Affiliation:
IMEC, Kapeldreef 75, Leuven, Belgium
*
*Corresponding author: Paul.vanderheide@imec.be

Abstract

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Type
New Frontiers in Atom Probe Tomography Applications
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 2504 - 2505
Copyright
Copyright © Microscopy Society of America 2019 

References

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