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Application of the Helium Ion Microscope for the Imaging and Analysis of Nanomaterials

Published online by Cambridge University Press:  03 August 2008

DC Bell ,
LA Stern ,
L Farkas  and
JA Notte
DC Bell
Affiliation:
Harvard University
LA Stern
Affiliation:
Carl Zeiss SMT Inc
L Farkas
Affiliation:
Carl Zeiss SMT Inc
JA Notte
Affiliation:
Carl Zeiss SMT Inc
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 1184 - 1185
Copyright
© 2008 Microscopy Society of America

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