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Analytical XTEM Study of Ir/InAlAs Interfacial Reaction for InP-based High Electron Mobility Transistors (HEMTs) Gate Technology

Published online by Cambridge University Press:  31 July 2006

L Wang
Affiliation:
University of Illinois at Urbana-Champaign
W Zhao
Affiliation:
University of Illinois at Urbana-Champaign
I Adesida
Affiliation:
University of Illinois at Urbana-Champaign

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Copyright
© 2006 Microscopy Society of America