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Analysis of Denton E-Beam 2 Nanofabricated Thin Films by Metrology

Published online by Cambridge University Press:  05 August 2019

Ronald Reliford Jr  and
Jafar F. Al-Sharab
Ronald Reliford Jr
Affiliation:
Department of Engineering Technology, Northwestern State University, Natchitoches, LA, USA.
Jafar F. Al-Sharab*
Affiliation:
Department of Engineering Technology, Northwestern State University, Natchitoches, LA, USA.
*
*Corresponding author: jafar@nsula.edu

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 822 - 823
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Wisitsoraat, A et al. , Journal of Electroceramics 17(1) (2006), p. 45.Google Scholar
[2]Fujiwara, H, Spectroscopic ellipsometry: principles and applications (John Wiley & Sons).Google Scholar
[3]Alves, JM et al. , Review of Scientific Instruments 75(12) (2004), p. 5362.Google Scholar
[4]This work was conducted while the primary author an intern at NIST. He is very thankful to the National Science Foundation, NEATEC, and the National Institute of Standards and Technologies who allowed for the use of their resources to perform this research. Special thanks to Dr. Gerard Henein, process engineer at NIST, for providing exquisite training in the field of Nanotechnology.Google Scholar