No CrossRef data available.
Article contents
An Evaluation of Beam-Damage Zone in Si Wafer Machined by Gatan MicroPREPTM Laser-Ablation
Published online by Cambridge University Press: 01 August 2018
Abstract
An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
![Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'](https://static.cambridge.org/content/id/urn%3Acambridge.org%3Aid%3Aarticle%3AS1431927618006219/resource/name/firstPage-S1431927618006219a.jpg)
- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1146 - 1147
- Copyright
- © Microscopy Society of America 2018
References
References:
[4] Thanks go to Andreas Meyer of GLOBALFOUNDRIES Fab1 for his insights and inspiring discussions, and Fab8 Management and Legal teams for supporting the publication clearance..Google Scholar