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AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

Published online by Cambridge University Press:  23 September 2015

Aaron Lewis ,
A. Komissar ,
A. Ignatov ,
Oleg Fedoroyov  and
E. Maayan
Aaron Lewis
Affiliation:
The Department of Applied Physics, The Hebrew University of Jerusalem
A. Komissar
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
A. Ignatov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
Oleg Fedoroyov
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel
E. Maayan
Affiliation:
Nanonics Imaging Ltd, 19 Hartum St., BYNET Bldg, Jerusalem, Israel

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1433 - 1434
Copyright
Copyright © Microscopy Society of America 2015 

References

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