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AFM and XPS Characterization of TiN Thin Films Grown on Nanoporous Al2O3 by using the DC Sputtering Technique Assisted by Balanced Magnetron

Published online by Cambridge University Press:  05 August 2007

C. Encinas Baca ,
I. Yocupicio ,
H. Esparza Ponce  and
A. Duarte Moller
C. Encinas Baca
Affiliation:
Centro de Investigación en Materiales Avanzados, Chihuahua, Mexico
I. Yocupicio
Affiliation:
Universidad de Sonora, Sonora, Mexico
H. Esparza Ponce
Affiliation:
Centro de Investigación en Materiales Avanzados, Chihuahua, Mexico
A. Duarte Moller
Affiliation:
Centro de Investigación en Materiales Avanzados, Chihuahua, Mexico
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2007 in Ft. Lauderdale, Florida, USA, August 5 – August 9, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S02 , August 2007 , pp. 998 - 999
Copyright
© 2007 Microscopy Society of America

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