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Advantages of using Plasma FIB Over a Gallium LMIS Source

Published online by Cambridge University Press:  23 September 2015

B.W. Arey ,
D.E. Perera ,
L. Kovarik ,
J. Liu ,
O. Qafoku ,
A. R. Felmy ,
R. Kelley ,
T. Landin  and
R. Alvis
B.W. Arey
Affiliation:
Pacific Northwest National Laboratory, Environmental Molecular Science Laboratory, 3335 Innovation Boulevard, Richland, WA 99354, USA
D.E. Perera
Affiliation:
Pacific Northwest National Laboratory, Environmental Molecular Science Laboratory, 3335 Innovation Boulevard, Richland, WA 99354, USA
L. Kovarik
Affiliation:
Pacific Northwest National Laboratory, Environmental Molecular Science Laboratory, 3335 Innovation Boulevard, Richland, WA 99354, USA
J. Liu
Affiliation:
Pacific Northwest National Laboratory, Environmental Molecular Science Laboratory, 3335 Innovation Boulevard, Richland, WA 99354, USA
O. Qafoku
Affiliation:
Pacific Northwest National Laboratory, 902 Battelle Boulevard, Richland, WA 99354, USA
A. R. Felmy
Affiliation:
Pacific Northwest National Laboratory, 902 Battelle Boulevard, Richland, WA 99354, USA
R. Kelley
Affiliation:
FEI Co., 5350 NE Dawson Creek Drive, Hillsboro, Or 97124, USA
T. Landin
Affiliation:
FEI Co., 5350 NE Dawson Creek Drive, Hillsboro, Or 97124, USA
R. Alvis
Affiliation:
FEI Co., 5350 NE Dawson Creek Drive, Hillsboro, Or 97124, USA

Abstract

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Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2001 - 2002
Copyright
Copyright © Microscopy Society of America 2015