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Advantages of Focused Ion Beam to Understand Redeposition, Secondary Sputtering Effects and to Create Microfluidic Structures

Published online by Cambridge University Press:  23 November 2012

L. Saraf  and
D. Britt
L. Saraf
Affiliation:
EMSL, Pacific Northwest National Laboratory, Richland, WA
D. Britt
Affiliation:
Utah State University, Logan, UT
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 608 - 609
Copyright
Copyright © Microscopy Society of America 2012

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