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Advances in Elemental Electron Tomography for the State-of-the-art Semiconductor Devices and Circuits Characterization and Failure Analysis

  • B. Fu (a1), M Gribelyuk (a1), Frieder H. Baumann (a1), C. Fang (a1), Wayne Zhao (a1), E. Chen (a1) and I. Brooks (a1)...
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Abstract

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References

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[1] Midgley, P. A. & Weyland, M. Ultramicroscopy 96 2003). p. 413.
[2] Williams, David B. & Barry Carter, C. in Transmission Electron Microscopy, 2nd Edition Springer New York, NYp. 9.
[3] Zhang, J., etal, Microscopy and Microanalysis 21(S3 2015). p. 2333.
[4] Baumann, F., et al, Microscopy and Microanalysis 22(S3 2016). p. 280.
[5] Pantel, R. Ultramicroscopy 111 2011). p. 1607.
[6] Fu, B., et al, Microscopy and Microanalysis 22(S3 2016). p. 326.
[7] The authors acknowledge R. Newkirk, B. Popielarski, and N. LaManque for preparing the TEM samples.

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