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Advanced Microscopy for the Semiconductor Industry

Published online by Cambridge University Press:  01 August 2004

Alain C. Diebold ,
Brendan Foran ,
Tobias Hanrath  and
Brian Korgel
Alain C. Diebold
Affiliation:
International SEMATECH, Austin, Texas
Brendan Foran
Affiliation:
International SEMATECH, Austin, Texas
Tobias Hanrath
Affiliation:
University of Texas Austin
Brian Korgel
Affiliation:
University of Texas Austin
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 526 - 527
Copyright
© 2004 Microscopy Society of America

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