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Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

  • Susanne Stemmer (a1), Melody D Agustin (a1), Yan Yang (a1), Steffen Schmidt (a1), Brendan Foran (a2), Gennadi Bersuker (a2) and D G Schlom (a3)...

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Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

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Advanced Characterization of Novel Gate Stacks for Si CMOS by Scanning Transmission Electron Microscopy

  • Susanne Stemmer (a1), Melody D Agustin (a1), Yan Yang (a1), Steffen Schmidt (a1), Brendan Foran (a2), Gennadi Bersuker (a2) and D G Schlom (a3)...

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