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Absolute-Scale Comparison with Simulation for Quantitative Energy-Dispersive X-Ray Spectroscopy in Atomic-Resolution Scanning Transmission Electron Microscopy

Published online by Cambridge University Press:  04 August 2017

S.D. Findlay
Affiliation:
School of Physics and Astronomy, Monash University, Melbourne, Australia.
Z. Chen
Affiliation:
School of Applied and Engineering Physics, Cornell University, Ithaca, USA.
M. Weyland
Affiliation:
Monash Centre for Electron Microscopy, Monash University, Melbourne, Australia. Department of Materials Science and Engineering, Monash University, Melbourne, Australia.
X. Sang
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA.
W. Xu
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA.
J.H. Dycus
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA.
J.M. LeBeau
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, USA.
L.J. Allen
Affiliation:
School of Physics, University of Melbourne, Melbourne, Australia.
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Abstract

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© Microscopy Society of America 2017 

References

[1] Watanabe, M & Williams, DB Journal of Microscopy 221 2006). p. 89.CrossRefGoogle Scholar
[2] Allen, LJ, D'Alfonso, AJ, Freitag, B & Klenov, DO MRS Bulletin 37 2012). p. 47.CrossRefGoogle Scholar
[3] LeBeau, JM, Findlay, SD, Allen, LJ & Stemmer, S Nano Letters 10 2010). p. 4405.CrossRefGoogle Scholar
[4] Chen, Z, et al, Ultramicroscopy 157 2015). p. 21.CrossRefGoogle Scholar
[5] Chen, Z, et al, Ultramicroscopy 168 2016). p. 7.CrossRefGoogle Scholar
[6] We thank Dr A.J. D’Alfonso and Mr Daniel Taplin for contributions to this work. This research was supported under the Australian Research Council's Discovery Projects funding scheme (Project DP140102538). XS, WX, JHD, and JML gratefully acknowledge the Air Force Office of Scientific Research (FA9550-14-1-0182) for support of this research and also acknowledge the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation. JHD acknowledges support for this work by the National Science Foundation Graduate Research Fellowship (Grant DGE-1252376).Google Scholar

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Absolute-Scale Comparison with Simulation for Quantitative Energy-Dispersive X-Ray Spectroscopy in Atomic-Resolution Scanning Transmission Electron Microscopy
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