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X-Ray Absorption Correction for Quantitative Scanning Transmission Electron Microscopic Energy-Dispersive X-Ray Spectroscopy of Spherical Nanoparticles

Published online by Cambridge University Press:  06 April 2016

Thomas Slater*
School of Materials, University of Manchester, Manchester M13 9PL, UK
Yiqiang Chen
School of Materials, University of Manchester, Manchester M13 9PL, UK
Gregory Auton
School of Computer Science, University of Manchester, Manchester M13 9PL, UK
Nestor Zaluzec
School of Materials, University of Manchester, Manchester M13 9PL, UK Electron Microscopy Center, Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439, USA
Sarah Haigh*
School of Materials, University of Manchester, Manchester M13 9PL, UK
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A new method to perform X-ray absorption correction for spherical particles in quantitative energy-dispersive X-ray spectroscopy in the scanning transmission electron microscope is presented. An absorption correction factor is derived and simulated data is presented encompassing a range of X-ray absorption conditions. Theoretical calculations are compared with experimental data of X-ray counts from Au nanoparticles to verify the derived methodology. The effect of detector elevation angle is considered and a comparison with thin-film absorption correction is included.

Materials Applications
© Microscopy Society of America 2016 

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